AMAT Applied Materials 0225-33921 Controller Device

Product manual:

AMAT Applied Materials 0225-33921 Controller Device
Product Overview

0225-33921 is a controller unit in AMAT semiconductor equipment, which serves as the core control unit of the process equipment and is responsible for managing and coordinating the operation of various subsystems of the equipment. This device is mainly used to collect sensor data, execute process logic, issue control commands, and communicate with the upper control system to ensure the stability and safety of semiconductor processes.

Technical functions and features

Multi channel signal processing

Receive multiple input signals from gas panels, vacuum systems, temperature sensors, power modules, and other sources.

Perform logical judgment and data processing, and issue execution instructions.

Interlocking and Security Control

Built in interlock logic to prevent operation when the chamber does not meet safety conditions or the system is abnormal.

Provide hardware level protection for critical process steps to reduce risks.

Communication and interface capabilities

Support communication with the upper control computer or PLC system to achieve data upload and remote monitoring.

Provide standardized interfaces that are compatible with other AMAT control cards and modules.

modular design

Detachable, replaceable, and upgradable for easy maintenance and functional expansion.

Design to meet the high cleanliness environment and continuous operation requirements of semiconductor equipment.

Application field

CVD/PVD process equipment

Control gas flow rate, chamber pressure, heater, and power module to achieve stable deposition process.

Etching and cleaning equipment

Manage plasma sources, gas inputs, temperature control systems, and actuators to ensure etching/cleaning accuracy.

Wafer Transfer System

Coordinate the operation of Loadlock doors, handling robots, and elevators to ensure the safety of wafer handling.

Automatic production line

Realize automatic monitoring and execution of process parameters, improve equipment operating efficiency and production capacity.

AMAT Applied Materials 0225-33921 Product details picture:

0225-33921

AMAT Applied Materials 0225-33921 product video

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