AMAT Applied Materials 0242-88626 Kit Pump Plate

Product manual:

AMAT 0242-88626 Pump Plate Kit
Product Overview

The AMAT 0242-88626 kit pump board is a modular board designed specifically for semiconductor equipment, used for the integration and control of pump systems. It can integrate the power supply, control signals, and interfaces of the pump to achieve stable driving of the pump and precise management of the process fluid. This module is usually installed in the pump station or gas/liquid processing subsystem of the equipment, and is an important component for achieving reliable operation and process control of the pump system.

Technical parameters (inferred general characteristics)

Type: Pump System Control/Interface Module

Function: Pump driver, pump status monitoring, interface signal distribution

Interface form: electrical control interface+fluid connection port

Electrical characteristics: Low voltage DC power supply (commonly+24VDC), with overcurrent and overvoltage protection

Applicable pump types: industrial pump systems such as vacuum pumps, gas pumps, liquid pumps, etc

Environmental adaptability: for use in clean rooms, resistant to high temperatures and corrosion

Application scenarios

Semiconductor process equipment pump system

Drive and control chamber vacuum pumps, gas circulation pumps, or liquid pumps

Process fluid management

Control the flow rate and pressure of process gases, cooling liquids, or chemical liquids

Equipment subsystem interface

Collaborate with controller modules, sensors, and actuators to achieve closed-loop control

Equipment maintenance and upgrade

Modular design facilitates pump system maintenance and quick replacement

Product advantages

Modular design: easy to integrate and maintain quickly

High reliability: ensuring the long-term stable operation of the pump system in semiconductor equipment

High safety: Built in electrical protection and status monitoring to reduce the risk of malfunctions

Process accuracy: can accurately control pump flow and pressure, ensuring process consistency

Strong compatibility: can adapt to different types of pump systems and process platforms

AMAT Applied Materials 0242-88626 Product details picture:

0242-88626

AMAT Applied Materials 0242-88626 product video

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