AMAT Applied Materials 0720-05235 Water Valve Component

Product manual:

AMAT Applied Materials 0720-05235 Water Valve Component
Product Overview

0720-05235 is a water valve assembly in AMAT semiconductor equipment, used to control the flow and pressure of equipment cooling water or process water. This component is an important component of the semiconductor equipment liquid cooling and process gas path system, ensuring precise and reliable temperature and fluid management of key process modules, cooling systems, and wafer carrier platforms.

Technical functions and features

Accurate flow control

Adjustable water flow and pressure to meet cooling or process water requirements.

Support linkage with controllers or gauge modules to achieve closed-loop flow control.

Fast response and reliability

Quick switch action ensures real-time response of process modules or cooling systems.

High reliability design, suitable for long-term continuous operation environment of semiconductor equipment.

Security protection mechanism

Built in overvoltage, leakage, and abnormal alarm mechanisms to prevent equipment damage.

Can be combined with an interlocking system to achieve automatic shutdown protection in case of waterway abnormalities.

Modular and easy to maintain

Compact structure, easy to install, disassemble, and replace.

The material meets the requirements of semiconductor cleanroom and reduces the risk of contamination.

Application field

cooling system

Provide precise water flow cooling for cold plate components, elevators, or heater modules.

Process liquid management

Control the flow rate of water or other process liquids required for etching, cleaning, and deposition processes.

Temperature control of wafer carrier platform

Collaborate with cold plate components and temperature control systems to maintain temperature stability of wafers and process modules.

Automated production line liquid control

Linkage with the controller and gauge module to achieve automatic opening and closing of the water valve and flow regulation.

AMAT Applied Materials 0720-05235 Product details picture:

0720-05235

AMAT Applied Materials 0720-05235 product video

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