AMAT Applied Materials 3020-01085 Cylinder Air Module

Product manual:

AMAT 3020-01085 Cylinder Air Module
Product Overview

AMAT 3020-01085 cylinder air module is a pneumatic execution unit in Applied Materials semiconductor equipment, used to control the expansion and contraction of cylinders, thereby achieving the movement, positioning, or clamping of process mechanical components. This module typically integrates pneumatic interfaces, control valves, and sensor interfaces, and can be linked with controllers, drivers, or I/O modules to achieve precise pneumatic operations. It is an important component for achieving automated mechanical actions in equipment.

Technical parameters (inferred general characteristics)

Type: Cylinder Control Module/Pneumatic Execution Module

Function: Cylinder telescopic control, air path distribution, status feedback

Gas source requirement: Industrial compressed air (commonly 0.5-0.7 MPa)

Interface: Electrical control signal interface (digital/analog)+tracheal interface

Working temperature: Suitable for semiconductor equipment cleanroom environment

Additional features: Some models come with travel sensors or pressure monitoring interfaces

Application scenarios

Mechanical action of semiconductor equipment

Control the cylinder action of the chamber door, fixture or process table

Pneumatic clamping and positioning

Realize automated clamping, release, and positioning when processing wafers or process components

Equipment automation control

Collaborate with controller modules, I/O cards, and drivers to achieve closed-loop pneumatic control

Safety interlock and process sequence control

Ensure that cylinder actions are performed in a safe state to avoid equipment or process damage

Product advantages

Accurate action: Ensure that the cylinder's telescopic position and speed meet the process requirements

Quick response: meeting the demand of semiconductor equipment for high-speed automation operation

Modular design: easy to disassemble, maintain, and replace

Safe and reliable: Supports status feedback and interlock functions to reduce the risk of equipment failure

Adapt to cleanroom environment: corrosion-resistant, low particle emissions, in compliance with semiconductor manufacturing standards

AMAT Applied Materials 3020-01085 Product details picture:

3020-01085

AMAT Applied Materials 3020-01085 product video

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