AMAT Applied Materials 30712650200 Controller Module
Brand: AMAT Applied Materials
Model:30712650200
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
AMAT Applied Materials 30712650200 Controller Module
Product manual:
AMAT Applied Materials 30712650200 Controller Module
Product Overview
30712650200 is a controller module in AMAT semiconductor equipment, used to manage and coordinate various process modules, power systems, servo drives, and pneumatic systems within the equipment. It is the core control unit of semiconductor process equipment, which achieves wafer handling, process parameter adjustment, and equipment automation control by receiving sensor data and sending control signals.
Technical functions and features
Multi module coordinated control
Control power module, pneumatic module, servo drive module, and temperature control system.
Support multi axis synchronous control and complex process action sequences.
data acquisition and processing
Received from sensors PCB、 Real time data of gauge module and actuator.
Analyze and adjust process parameters to achieve closed-loop control.
Security and protection functions
Built in interlock, alarm, and exception handling logic to prevent damage to wafers or equipment.
Support protection mechanisms such as overvoltage, overcurrent, and abnormal temperature.
Modularity and compatibility
Can be quickly installed, disassembled, and upgraded for easy maintenance.
Various AMAT controllers PCB、 The servo module and power module are seamlessly compatible.
Application field
Wafer handling system
Control the Loadlock elevator, robotic arm, and pneumatic module to achieve safe wafer handling.
Process module management
Coordinate the operation of heaters, cooling components, ESC power controllers, and other process modules.
Automated production line control
Integrate data collection, process monitoring, and remote control to achieve overall automation of equipment.
Security interlock system
Cooperate with pneumatic modules, gauge controllers, and drive modules to ensure equipment and wafer safety.
AMAT Applied Materials 30712650200 Product details picture:
30712650200
AMAT Applied Materials 30712650200 product video
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