AMAT Applied Materials C190238 Pressure Sensor

Product manual:

Product Overview

AMAT C190238 is a pressure sensor used in Applied Materials semiconductor equipment.

Technical parameters (inferred based on AMAT pressure sensor characteristics)

Type: Pressure Sensor/Pressure Transmitter.

Measurement range: Suitable for the vacuum to low pressure range required for semiconductor processes, such as Torr to atmospheric pressure.

Output signal: Analog signal (0-10 V or 4-20 mA) or digital signal interface for the control system to read.

Interface method: flange or threaded interface, convenient for installation in chambers or pipelines.

Installation location: Process chamber, transmission chamber, or gas branch pipeline.

Features: High precision, high repeatability, fast response, suitable for semiconductor clean environment and corrosion resistance requirements.

Application scenarios

Vacuum chamber pressure monitoring

Real time pressure detection in deposition (CVD, PVD), etching (Etch), or cleaning chambers.

Monitoring and control of pneumatic system

Collaborate with a Mass Flow Controller (MFC) and valves to achieve closed-loop pressure control.

Process stability guarantee

Adjust the pump and valve operation based on sensor feedback to ensure that the process pressure remains within the set range.

Product advantages

High precision and high repeatability: meet the strict requirements of pressure control in semiconductor processes.

Quick response: suitable for real-time closed-loop control, achieving precise action adjustment.

Corrosion resistance and strong adaptability to clean environments: suitable for gas and vacuum environments inside semiconductor equipment.

Modular maintenance is convenient: it can be quickly disassembled or replaced, reducing equipment downtime.

Good compatibility: Designed specifically for AMAT series devices, the interface and control system are perfectly matched.

AMAT Applied Materials C190238  Product details picture:

C190238

AMAT Applied Materials C190238  product video

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