AMAT Applied Materials ESC-W2 Power Controller

Product manual:

AMAT Applied Materials ESC-W2 Power Controller
Product Overview

ESC-W2 is a power supply controller in AMAT semiconductor equipment, dedicated to managing the DC and AC power outputs of critical process modules. It is typically used in conjunction with electrostatic chucks (ESCs), heaters, solenoid valves, or other critical actuators to ensure wafer safety and process consistency during semiconductor processes by precisely adjusting voltage and current.

Technical functions and features

Accurate power control

It can provide stable DC or AC voltage and current output to meet high-precision process requirements.

Support multi-channel output to control different process modules separately.

Monitoring and protection functions

Real time monitoring of output voltage, current, and power status.

Built in overvoltage, overcurrent, and short-circuit protection, and linked with interlocking systems to improve wafer and equipment safety.

Interface and Communication Capability

Regarding device controllers PCB、 Seamless connection of modules such as DC power supplies.

Support remote control and data collection to achieve automated production line integration.

modular design

It can be quickly installed, disassembled, and replaced, making it easy to maintain and upgrade.

Design to adapt to semiconductor cleanrooms and continuous operation environments.

Application field

Electrostatic Chuck (ESC) System

Control the ESC adsorption voltage to ensure stable fixation of the wafer during deposition, etching, and other processes.

Heater and temperature control unit

Provide precise power control for hot ion heaters and resistance heaters to ensure uniform and repeatable process temperature.

Electromagnetic valve and actuator drive

Manage the power supply of pneumatic valves, gas flow controllers, and other actuators to ensure precise control of the process gas path.

Semiconductor automation production line

Collaborate with controllers, DC power supplies, and PCBs to achieve overall power management and automated process control of the equipment.

AMAT Applied Materials ESC-W2 Product details picture:

ESC-W2

AMAT Applied Materials ESC-W2 product video

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