AMAT AS00021-02 Water Leakage Detector Module

Brand: AMAT
Model:AS00021-02
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT AS00021-02 Water Leakage Detector Module

Product manual:

AMAT AS00021-02 Water Leakage Detector Module
Product Overview

The AMAT (Applied Materials) AS00021-02 leak detector module is a safety monitoring module used in semiconductor manufacturing equipment, mainly for detecting liquid leaks inside equipment or critical process areas. It can monitor coolant, process gas systems, or other fluid pipelines in real-time. When abnormal liquid is detected, it triggers an alarm or shutdown interlock signal to protect equipment and processes from damage caused by liquid leakage.

Technical parameters (typical direction, specific data should refer to the original factory information)

Detection type: Liquid leakage detection

Sensitivity: High sensitivity probe, capable of detecting trace liquids

Output signal: digital signal/alarm signal, can be linked with control system or interlock system

Interface: Compatible with AMAT control system and safety interlock logic

Environmental adaptability: Suitable for semiconductor equipment cleanrooms and high humidity/temperature environments

Installation method: Modular installation for easy layout of key points within the equipment

Application scenarios

Cooling system monitoring

Detect coolant pipeline leaks to prevent equipment overheating or electrical module damage

Control box and chassis control box protection

Monitor internal liquid infiltration or pipeline leakage to avoid damage to electronic modules

Deposition process (CVD/PVD/ALD)

Monitor the cooling and auxiliary liquid system of the monitoring chamber to ensure safe operation of the process

Etching and ion implantation equipment

Prevent liquid leakage from affecting RF modules, pumps, or sensors to ensure process stability

Factory Safety and Maintenance

Linked with the interlocking system, if water leakage is detected, an immediate alarm or shutdown will be triggered to protect the safety of operators and equipment