AMAT DIP-280-015 Interlock Module

Product manual:

AMAT DIP-280-015 Interlock Module
Product Overview

The AMAT (Applied Materials) DIP-280-015 interlock module is a safety control and interlock unit used in semiconductor manufacturing equipment. It ensures safe operation of equipment during operation, maintenance, or abnormal situations through logical interlocking and signal monitoring. Interlocking modules are mainly used to prevent cavities, control boxes, or critical process modules from being opened or operated in an unsafe state, thereby protecting the safety of equipment, processes, and operators.

Technical parameters (typical direction, specific data should refer to the original factory information)

Control mode: Logic interlock, supporting hardware and electronic signal input

Interface type: Digital input/output interface, can be connected to device control system and security system

Signal types: status detection, door lock signal, fault alarm

Installation method: modular, can be integrated into the control box or chassis

Environmental adaptability: high temperature resistance, vibration resistance, suitable for semiconductor equipment cleanroom environment

Application scenarios

Equipment cavity safety control

Prevent the reaction chamber, vacuum chamber, or processing module from opening in abnormal conditions

Ensure the safety of the process and personnel operation

Control box and chassis control box safety protection

Monitor the status of control box doors and module locks

Integrate with the equipment control system to achieve abnormal shutdown or alarm

Deposition process (CVD/PVD/ALD)

Provide safety interlocks during maintenance or operation of sedimentation chambers

Prevent equipment damage or process abnormalities caused by misoperation

Etching process equipment

Safely interlock the etching chamber and pneumatic system

Ensure safe operation during equipment operation

Factory Automation and Safety Management

Combining with the upper control system to achieve remote monitoring and safety management

Provide device status indication and abnormal alarm function

AMAT DIP-280-015 Product details picture:

DIP-280-015

AMAT DIP-280-015  product video

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