BROOKS 001-4130-03 Robot Aligner

Brand:BROOKS
Model:001-4130-03
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

BROOKS 001-4130-03 Robot Aligner

Product manual:

Brooks Automation 001-4130-03 is a high-precision robot aligner widely used in the semiconductor manufacturing field,
Especially during the wafer processing, ensure that the wafer can be accurately aligned in processes such as photolithography, etching, and deposition.

Core features:
Control accuracy: Provides nanometer level accuracy, with an error range typically of ± 0.1 μ m.

High performance positioning: With an X-Y travel range of up to 400mm, it supports high-precision positioning operations.

Alignment speed: The speed in the X/Y direction can reach 100mm/s, and the speed in the θ direction is 10 °/s.

Repeatability: Provides extremely high repeatability accuracy, with ± 0.5 μ m in the X/Y direction and ± 0.05 μ m in the θ direction.

Load capacity: The maximum load capacity is 5 kg, suitable for most standard wafers and shelves.

Working temperature range: It can work stably in an environment from 0 ° C to+50 ° C and adapt to various industrial environments.

Protection capability: It has an IP65 protection level, is dustproof and waterproof, and can operate continuously in harsh environments.

Communication interface: Supports RS-232, RS-485, and Ethernet interfaces,
Facilitate connection and integration with other devices or systems.

Application areas:
Semiconductor manufacturing: used for wafer alignment in processes such as photolithography, etching, and deposition,
Ensure the accuracy and reliability of the process.

Microelectronics device manufacturing: such as LED, MEMS (Micro Electro Mechanical Systems)
Provide precise positioning and alignment in the production of microelectronic products such as solar cells.

Precision positioning system: widely used in scientific research, experiments, and high-end equipment that require high-precision positioning.