Gasonics 001-0000-39 Processing and Transmission Module

Product manual:

Product Name:
Gasonics 001-0000-39 Processing and Transport Module (also known as Wafer Handling Module)

Product Overview:
This module is one of the core components used for automatic wafer handling in Gasonics plasma equipment,
Commonly used in plasma cleaning or de gluing equipment of Aura, L3510 and other models.
Its main function is to accurately transport wafers between the wafer stage, processing chamber, and buffer area, supporting the automated operation of the equipment.

Application areas:
Semiconductor wafer handling automation

In processes such as plasma cleaning and photoresist stripping, automatic transfer of wafers from the input end to the processing chamber and then to the output end is achieved.

Internal transmission system of plasma process equipment

Ensure efficient flow of wafers between multiple process chambers and improve overall processing efficiency of the equipment.

Equipment upgrade and maintenance

Replace the original transmission module, improve handling accuracy and operational stability, and reduce human intervention.

Wafer Processing in High Cleanliness Environment

Designed for cleanrooms, supports particle free handling, and avoids contaminating wafer surfaces.

Product advantages:
High positioning accuracy: ensuring that the wafer is accurately positioned on the target platform or cavity

Strong action reliability: suitable for long-term production environments

Good compatibility: can directly replace the original module without modification

Convenient maintenance: modular design for quick replacement and maintenance

Product details picture:

001-0000-39

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