Gasonics 02-20-01 Indoor Transfer Robot

Brand:Gasonics
Model:02-20-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 02-20-01 Indoor Transfer Robot

Product manual:

1、 Product Overview
Gasonics 02-20-01 is an In Chamber Transfer Robot designed specifically for semiconductor plasma processing equipment.
This robot is responsible for precise handling and positioning of wafers or workpieces inside the device cavity,
It usually works in a high cleanliness and vacuum environment to ensure the safe and fast completion of wafer loading, unloading, transfer, and alignment during plasma processing.
Its mechanical structure is compact, the action is flexible, and it is equipped with a high-precision drive system and position feedback device.

2、 Application Fields
1. Semiconductor plasma stripping and cleaning equipment
As a handling device for wafers inside the cavity, it enables the transfer of wafers from the load lock to the processing cavity;

Support multi axis linkage to ensure precise wafer alignment and improve process repeatability.

2. Automated wafer manufacturing production line
Collaborate with robotic arms and loading and unloading systems in highly automated production environments to complete continuous production operations;

Reduce the pollution risk caused by manual operation.

3. Thin film deposition and etching equipment
As a critical material handling step, ensure the safe and efficient transfer of wafers between different process steps;

Adapt to the processing requirements of wafers of different sizes.

4. Research and experimental platform
Plasma equipment used for research institutions and process development platforms, facilitating quick sample switching and supporting multi process validation.