Details
Gasonics 03470-01 Input Regulating Capacitor
Product manual:
Product Name: Gasonics 03470-01 Input Regulating Capacitor
Component type: High voltage input filter/buffer capacitor
Main function: Used to stabilize power input signals, filter out voltage spikes and high-frequency interference, and improve system power supply quality
1、 Power input circuit for plasma processing equipment
This capacitor module is installed on the main power input terminal of Gasonics plasma cleaning equipment (such as Aura, L3500, P5000 series), used for filtering and transient stability processing of input voltage.
Typical use:
Smooth rectified DC voltage fluctuation
Absorbing high-frequency switch interference and electromagnetic noise
Provide instantaneous power support to avoid system power failure
2、 RF power system filtering buffer
In plasma generators or RF power modules, 03470-01 can be used as a buffer capacitor to reduce the impact of RF switching power on the main power grid.
Function performance:
Reduce voltage spikes at the output of RF power supply
Reduce EMI radiation of power switching devices
Protect downstream modules such as power amplifiers and control boards from voltage fluctuations
3、 Main control power protection and lifespan extension
Capacitors are one of the life determining components in power control modules. The 03470-01 capacitor absorbs input transient voltage, reduces system load shock, and extends the service life of the main control board, I/O board, and logic module.
The application module includes:
Power controller (such as A90-027-01)
Stepper driver power buffer
RF controller and cavity interface control module
Product details picture:

03470-01
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