Gasonics 04290-101 Load Lock
Brand:Gasonics
Model:04290-101
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
Gasonics 04290-101 Load Lock
Product manual:
Gasonics 04290-101 Load Lock
Product Function and Function:
Realize safe vertical transfer of wafers between the load lock chamber and the processing chamber
Maintain airtightness during the transfer process to prevent wafer contamination
Cooperate with the equipment automation control system to achieve efficient automatic loading and unloading operations
Application areas:
Load lock chamber in semiconductor wafer manufacturing equipment
Wafer transfer system for plasma stripping and cleaning equipment
Substrate airtight transfer environment in display panel manufacturing
Clean transfer of wafers in microelectronic device production lines
Other automated manufacturing systems that require high cleanliness and high vacuum environment
characteristic:
Closely cooperate with the control system and gas management system to ensure process stability
Design to meet high cleanliness production requirements
Support automated and high-precision wafer transfer operations
Product details picture:
04290-101
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