Gasonics 04290-201 Load Lock Elevator

Brand:Gasonics
Model:04290-201
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 04290-201 Load Lock Elevator

Product manual:

1、 Component Introduction
Name: Load Lock Elevator

Part number: 04290-201

Applicable equipment: Gasonics A-2000/A-2000LL/Aura series plasma stripping machine

Function type: Wafer Loadlock lifting mechanism component

2、 Main functions
This module is a vertical lifting actuator installed in the Loadlock chamber, used for:

Wafer Boat, Wafer Plate

During the loading and unloading process, move the wafer from the Transfer Robot interface position to the processing position or vice versa

Cooperate with pressure, vacuum, and position sensors to achieve precise positioning and automated operation

3、 Core technical characteristics
Parameter description
Most driving methods use stepper motor drive or servo motor+screw structure
The lifting stroke is generally 100mm~300mm, designed according to the height of the cavity
Position control with upper and lower limit sensors, supporting precise stop in the center position
Interface control is linked with the main controller (such as A90-003-01) or Elevator Driver module
Load capacity supports single or whole wafer tray lifting (6 "/8" compatible)

4、 Typical Composition
Elevator platform (with tray support)

Lift screw/slide rail system

Stepper/servo motor

Optoelectronic or contact limit sensor

Control cable and encoder feedback (partial versions)