Gasonics 04630-003 Indexer

Product manual:

The Gasonics 04630-003 indexer is a wafer transport device or component used in Gasonics plasma stripping systems,

1、 Product Overview
The Gasonics 04630-003 indexer is a mechanical actuator component installed inside the plasma stripping machine or wafer handling subsystem,
Responsible for the "step-by-step" position conversion of wafers in the processing flow, that is, accurately moving wafers between multiple processing stations.
For example, positioning and conveying between the upper wafer position in the front section, the middle reaction chamber, and the lower wafer position in the rear section.

2、 Technical functions
Wafer positioning: Automatically align the wafer with the center of the reaction chamber to improve processing uniformity

Step by step drive: Complete the step-by-step movement of wafers through precision motors or pneumatic mechanisms

Synchronize with the system: Communicate with the Gasonics main controller to achieve process linkage

Position feedback: Built in sensors (such as photoelectric or proximity switches) provide feedback on the current workstation status

3、 Application Fields
The 04630-003 indexer is commonly used in the following Gasonics systems (models may be Aura, L3510, PEP series, etc.):

Wafer loading/unloading process

Automatically pick up, move, and place pieces from FOUPs, boxes, or cartridges

Wafer transfer before and after plasma stripping reaction

Accurately feed the wafer into the center of the cavity and send it out after processing

Wafer distribution/integrated control in multi cavity systems

Switching wafer positions between multiple process chambers, supporting assembly line processes

4、 Product advantages
High positioning accuracy: small repeatability error, meeting advanced process requirements

Compact structure: suitable for equipment structures with limited indoor space in cleanrooms

Reliable and durable: Made of wear-resistant materials and industrial grade motor system, suitable for long-term operation

Strong maintainability: modular design, easy to replace, debug, and maintain

Product details picture:

04630-003

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