Gasonics 06763-005 Control Board

Brand:Gasonics
Model:06763-005
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 06763-005 Control Board

Product manual:

1、 Basic Information
Part number: 06763-005

Name: Control Board

Equipment manufacturer: Gasonics (now under Applied Materials)

Usage category: Control of internal subsystems/interface coordination of equipment

2、 Function Introduction
The 06763-005 control board is a functional module control board used in the Gasonics plasma stripping system. Its main functions are:

Manage the status and actions of a subsystem or peripheral device (such as elevators, sensors, power modules, etc.)

Execute system control commands (logic control, switch action, relay drive)

Implement input/output (I/O processing) of device control signals

Communicate with the main control board, provide feedback on status or receive commands

3、 Possible uses (based on similar model logic)
Although the board is a non main control board (such as A90-003-01), it usually performs one of the following functions:

Functional Direction Description
Elevator control controls the movement of the lifting platform within Loadlock or Process Chamber
Electromagnetic valve drives and controls the on/off of pneumatic valves, supporting automatic processes
Photoelectric sensor management receives status from upper/lower sensors and door switches
The status interlock management sends information to the main control, such as whether the system is ready and whether the door is closed

4、 Applicable equipment scope (speculated)
This control board is widely used in specific modules of the following models (depending on subsystem configuration):

Gasonics A-2000/A-2000LL series

Aura 2000/Aura 3010 plasma stripping equipment

PEP 3510/3600 series (partial versions)

Interface expansion board for OEM system