Gasonics 06764-005 Control Board

Brand:Gasonics
Model: 06764-005
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 06764-005 Control Board

Product manual:

product name
Gasonics 06764-005 Control Board

Product application areas
Main control and collaboration of plasma de gluing/cleaning equipment
Coordinated control of the load-bearing system in Gasonics plasma processing equipment,
Manage the process flow, state machine, and fault interlocking.

Wafer handling and mechanism control
Cooperate with the motor drive and pneumatic module to control the actions of the conveying arm, lifting platform, clamping/releasing, etc,
Ensure the rhythm of loading and unloading and transportation.

Load lock and vacuum interlock control
Handle the logic of load lock prohibition, chamber pressure threshold, pumping and inflation sequence, etc., to ensure the vacuum environment and safety interlock.

Gas path/valve and process medium management
Drive solenoid valves, switches and feedback collection related to mass flow control,
Implement gas feed, discharge, and purge sequence control.

Temperature control and process monitoring interface
Collect heating table and chamber temperature and related sensor signals, and output control quantities to the upper or execution unit,
Used for constant temperature and over temperature protection.

RF/Power Subsystem Enabling and Protection
Enable/disable control and status monitoring of RF power supply, bias power supply, etc,
Participate in interlock protection for overcurrent, overvoltage, overheating, etc.

I/O aggregation and upper computer communication
As an internal I/O aggregation node of the device, it completes data exchange with the human-machine interface/upper industrial control computer,
Support alarm, event, and recipe execution feedback.

Maintenance and replacement upgrade scenarios
Used for spare parts replacement and fault repair of Aura series and other models; As a compatible control board in the renovation of old machines,
Restore the stability of device operation.