Gasonics 06764802 Controller Module

Brand:Gasonics
Model: 06764802
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 06764802 Controller Module

Product manual:

Product Name: Gasonics 06764802 Controller Module
Component type: Multifunctional Controller Module
Main function: Used to control, coordinate, and monitor the operating status of various subsystems of Gasonics plasma equipment. As one of the core control components, it manages the signal flow and logic control of actuators, sensors, and communication interfaces

1、 Core of Process Control
The 06764802 controller module is responsible for executing key process control logic, coordinating the orderly operation of gas supply, RF power supply, vacuum system, and moving parts.

Typical functions:

Control gas flow rate and ratio (in collaboration with MFC)

RF power start/stop control (in conjunction with RF power module)

Vacuum chamber valve and pressure feedback control

Process operation status management and step switching

2、 System Integration and Signal Management
This controller module connects multiple subsystem modules (I/O board, display module, alarm system, etc.), summarizes and distributes input/output signals, and is the signal processing and command center of the device.

Interface type:

Multi channel digital input/output (DI/DO)

Analog Signal Channel (AI/AO)

Communication protocol interface (may include serial port or customized communication protocol)

3、 Security and interlock control
The controller contains multi-level interlocking protection logic to ensure the safety of equipment operation, such as not allowing RF power to be started or opening doors when vacuum is not applied.

Examples of security functions:

Load lock door status detection

Process chamber pressure interlock

Temperature control or power failure locking operation