Gasonics 11070-2 Controller Module

Product manual:

The Gasonics 11070-2 controller module is a key electronic control unit in the Gasonics plasma stripping system,
Responsible for centralized control and signal processing of a subsystem or multiple operational functions within the equipment,
Commonly used for controlling plasma power, gas flow rate, vacuum state, or process timing.

1、 Product Overview
The Gasonics 11070-2 controller module is a highly integrated functional control circuit board,
Its function is as the central nervous system of plasma stripping equipment, used to process input/output signals, control execution components
Receive sensor feedback and collaborate with the main system for communication and operation.

Its part number "11070-2" belongs to Gasonics, indicating that this module is a specific configuration or version update of standard control electronic components.

2、 Possible technical features (depending on device configuration)
Description of Control Function Types
RF power control adjusts the RF power output of the plasma reaction chamber to maintain stable plasma density
Gas flow regulation control mass flow meter (MFC) ensures stable supply of gas required for plasma reaction
Vacuum/pressure regulation management chamber vacuum pump and valve status, achieving rapid pumping and stable reaction pressure
Sequential logic control controls each submodule to run in sequence according to the set process steps (from top to bottom)
Security and alarm management detection system status, output alarm signals (such as RF abnormality, temperature abnormality)

3、 Application scenarios
The Gasonics 11070-2 controller module is widely used in the following situations:

Gasonics plasma stripping equipment

For example, Aura 2000, PEP 3510, L3510, Aura 3010 series devices

Semiconductor wafer manufacturing

Control key processes such as photoresist stripping, cavity cleaning, and pre - and post process cleaning

Equipment testing and maintenance system

As part of the testing interface board or engineering debugging platform, assist technical personnel in performing system validation

Product details picture:

11070-2

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