Gasonics 12N-010-13 Mechanized Panel

Brand:Gasonics
Model: 12N-010-13
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 12N-010-13 Mechanized Panel

Product manual:

Product Name: Gasonics 12N-010-13 Mechanized Panel
Component type: Mechanical Control Panel
Main function: As the human-machine interaction interface of the device, it provides physical buttons, switches, and indicator lights to achieve control and status feedback of the mechanical part of the plasma equipment

1、 Mechanical operation and control interface
This mechanized panel is widely used in Gasonics plasma cleaning and ashing equipment, mainly for controlling mechanical actions such as lifting platforms, load locking doors, vacuum valves, etc.

Typical functions:

Start and stop mechanical actions (such as the up and down movement of the lifting plate)

Door lock opening and closing control

Emergency stop button and safety interlock indication

The status indicator light provides feedback on the mechanical position and operating status

2、 Equipment mechanical subsystem control
The 12N-010-13 panel, in conjunction with the main control logic board and driver module, directly controls the mechanical execution components to ensure accurate response of the mechanical parts in the process flow.

Control object:

Load lock mechanical door and lifting mechanism

Mechanical drive of vacuum chamber valve

Mechanical Interlocking and Safety Protection System

3、 Maintenance and operational convenience
The mechanical panel design complies with industrial standards, is easy to operate and durable, and is convenient for on-site technicians to operate and maintain the equipment.

Maintenance points:

Regularly check the sensitivity and contact condition of buttons and switches

Ensure that the indicator light displays normally and the wiring is securely connected

Confirm that the emergency stop and safety interlock functions are effective

4、 Applicable industries and equipment
Semiconductor Manufacturing Equipment

Plasma cleaning and etching equipment

Automated Process Machinery Control System

Microelectronic manufacturing process mechanical operation platform