Details
Gasonics 13389-01 power module
Product manual:
product name
Gasonics 13389-01 power module
Product application areas
Internal power supply system of plasma equipment
Provide stable DC power supply for multiple subsystems in Gasonics plasma ashing or etching equipment, such as control boards, sensors, valve control units, etc.
RF system auxiliary power supply
As an auxiliary power supply module for high-frequency subsystems such as RF power supply or matching network, it ensures stable startup and operation of the RF system.
Voltage/current supply for key components
Accurately output specific voltage/current to drive key components in equipment such as heaters, solenoid valves, cooling systems, etc.
Modular components of equipment power architecture
As an independent module in the overall power system, it facilitates system partition management, quick replacement and maintenance, and enhances equipment reliability.
Standard components for industrial control system power supply
It can be used in other industrial control scenarios that require high reliability power supply, especially suitable for high-precision equipment that requires stable output and low interference.
System maintenance and spare parts replacement
Often used as original standard replacement parts for Gasonics Aura series equipment, restoring the original power supply performance during equipment maintenance and refurbishment.
Product details picture:

13389-01
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