Gasonics 15132-01 Robot Wafer Mover
Brand:Gasonics
Model: 15132-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
Gasonics 15132-01 Robot Wafer Mover
Product manual:
Product Overview:
Gasonics 15132-01 is a robotic wafer mover used in semiconductor manufacturing equipment,
Belongs to the type of three-axis robotic arm (Z-Bot). It is mainly responsible for automatic wafer handling,
Realize precise transfer of wafers between various workstations within the equipment, improve the automation level and processing efficiency of the production line.
Technical parameters (typical):
Number of Motion Axes: Three Axes (X, Y, Z Direction)
Transport objects: semiconductor process materials such as wafers and carriers
Control mode: mechanical drive, coordinated with the main control system of the equipment to coordinate movement
Compatible equipment: Gasonics Aura series, L-3500, L-3510 and other semiconductor process equipment
Structural form: Industrial grade robotic arm, compliant with cleanroom usage standards
Application scenarios:
Automatic wafer handling and positioning
Wafer transfer in semiconductor cleaning, etching, deposition and other process flows
Accurate transfer of materials within automated production lines
Replace manual handling to improve production stability and efficiency
Product advantages:
High precision positioning and motion control
Compact structure, suitable for integration into various semiconductor devices
Adapt to cleanroom environment design
Can serve as important spare parts for equipment maintenance and upgrades
Product details picture:
15132-01
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