Gasonics 17305-01 engine

Brand:Gasonics
Model: 17305-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics 17305-01 engine

Product manual:

Product Name:
Gasonics 17305-01 Microwave Power Generator

Product Overview:
Gasonics 17305-01 is a microwave power generation module used in plasma processing equipment such as the Aura 3000/3010 series.
This device is mainly responsible for generating high-frequency microwave energy for exciting plasma, thereby achieving processes such as wafer cleaning and debonding.

Technical parameters (typical):

Power level: approximately 1250W to 2000W

Output frequency: Standard industrial microwave frequency band (usually 2.45 GHz)

Input voltage: 200-240V AC, single-phase or three-phase (depending on equipment configuration)

Interface type: microwave output interface+control signal port

Structural form: Modular design, compatible with Gasonics series host systems

Application areas:

Semiconductor plasma cleaning process (such as photoresist stripping)

Microwave power units in equipment such as Gasonics Aura 3000/3010

Plasma support system in process development laboratory and wafer manufacturing production line

Microelectronics MEMS、 Pre packaging processing related manufacturing equipment

Product advantages: