Gasonics 17382-01 Temperature Control

Product manual:

product name
Gasonics 17382-01 Temperature Control Module

1、 Product Overview
Gasonics 17382-01 is a temperature control module specifically designed for Gasonics plasma cleaning equipment, widely used in series such as Aura 3000, 3010, and L3510. This module is used for precise temperature monitoring and closed-loop adjustment of multiple heating points inside the device, such as chambers, process platforms, or hot plates, to ensure process stability.

2、 Technical parameters
Control method: closed-loop temperature control, possibly based on PID algorithm

Signal input: thermocouple (such as K-type) temperature signal acquisition

Output type: Analog or digital signal output to heater control circuit

Alarm function: capable of high and low temperature alarm and fault feedback

Installation form: modular design, plug-in or base fixed type

Compatible systems: Gasonics Aura 3000/3010/L3510

3、 Application scenarios
Control the temperature of the plasma chamber or stage

Real time adjustment of heater output to prevent overheating or temperature drift

Ensure the thermal stability of temperature sensitive processes such as photoresist ashing or dry cleaning

Linked with the main control system, used for temperature recording and safety control of equipment

Product details picture:

17382-01

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