Gasonics 17547-01 Control Components

Brand:Gasonics
Model: 17547-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics 17547-01 Control Components

Product manual:

Product Name: Gasonics 17547-01 Control Component
Component type: Integrated Control Assembly Module
Main function: Undertake some core control tasks in Gasonics plasma cleaning equipment, such as process management, signal distribution, actuator driving, and status monitoring

1、 Process control unit of plasma cleaning equipment
This control component is widely used in plasma ashing equipment such as Gasonics Aura, L3510, AE series, etc., as a key module in the process control system.

Typical use:

Control process parameters such as plasma processing time, gas on/off, power regulation, etc

Receive control commands from the host or operation panel

Send control signals to downstream actuators (solenoid valves, lifting platforms, RF power supplies)

2、 Signal integration and interface conversion module
The 17547-01 control component is often used as a signal bridge between multiple subsystems in a system, responsible for integrating and distributing different signal standards (analog, digital, TTL).

Applicable scenarios:

Convert sensor/encoder signals into control commands

Realize data synchronization between PLC and mechanical subsystem

Connect device diagnosis and fault protection circuit (such as interlock system)

3、 Actuator driver and feedback logic processing
This component integrates control logic for driving stepper motors, relays, pneumatic components, and other devices, and monitors and judges their feedback status in real time.

The controlled objects may include:

Load lock lifting plate (such as A90-029-03)

Stepper driver (such as RD-323M10)

Chamber gate valve, gas flow controller (MFC)

Cooling water/temperature control circuit start relay