Gasonics 210-0091-001-A Port Module

Brand:Gasonics
Model:210-0091-001-A
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics 210-0091-001-A Port Module

Product manual:

product overview
Gasonics 210-0091-001-A is a port module used in plasma cleaning equipment,
The main function is to achieve physical and signal interface connections between the process chamber and external equipment (such as wafer transfer devices, Loadlocks, interface transmission systems, etc.).

Technical Parameter
Model: 210-0091-001-A

Type: Port/Interface Module

Function: Wafer loading/unloading interface management, signal and pneumatic control transmission

Interface type: Multi channel cable connector+pneumatic/vacuum joint

Installation method: Fixed installation of panel or equipment frame

Communication method: Connect with the main control system to control components such as chamber doors, vacuum pumps, and rotary interfaces

Adaptation platform: Gasonics Aura series plasma cleaning equipment (such as Aura 2000, etc.)

Application scenarios
Wafer loading interface control
As the physical interface for wafer entry and exit in the process chamber, it works in conjunction with the handling robotic arm and conveyor system to ensure the safe transfer of wafers.

Gas and vacuum channel interface
Manage and control the physical connection of gas injection and vacuum pump interface to maintain and exchange the process atmosphere in the chamber.

Signal linkage and synchronization
Manage the input and output of process control signals to ensure synchronous operation between peripherals and chambers, such as access control, sensors, positioning signals, etc.

Maintain and replace connection nodes
Used as an easy to maintain interface component, it can be quickly disassembled and disassembled, simplifying equipment fault location and maintenance operations.

Product advantages
Stable and reliable structure: Industrial grade connection design, suitable for high-frequency operation and complex environments

High interface integration: combining electrical, pneumatic, and logic control to improve system integration efficiency

Convenient maintenance: modular design for quick replacement or maintenance, reducing downtime

Strong equipment compatibility: highly compatible with Gasonics Aura series plasma cleaning systems, supporting system cascade expansion