Gasonics 212689-AN1 Arm Controller

Brand:Gasonics
Model: 212689-AN1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics 212689-AN1 Arm Controller

Product manual:

product overview
The Gasonics 212689-AN1 arm controller is a drive control module used for robotic arms or transfer mechanisms in plasma cleaning equipment, mainly responsible for automatic handling, positioning,

Technical Parameter
Model: 212689-AN1

Control type: servo control or stepper motor drive (depending on the matching motor type)

Control object: Wafer handling robotic arm/Transfer Arm

Input signal: Action command signal issued by the main control system (such as start, stop, position command)

Output signals: motor drive, power control, position feedback signal, etc

Installation method: Modular rack installation, connecting the robotic arm to the main control system

Electrical interface: standard multi-core connector, compatible with arm feedback and power supply system

Applicable equipment: Gasonics Aura 1000/Aura 2000/Aura 3010 plasma cleaning equipment, etc

Application scenarios
Wafer transfer control
Control the automatic handling of wafers between Cassette, Loadlock, and process chambers to ensure precise alignment and smooth transfer.

Linkage with vacuum system
Synchronize with the vacuum door control system to ensure that handling actions are only performed under safe air pressure conditions.

Multi axis linkage operation
Control the rotation, extension, lifting, and other multiple degrees of freedom movements of the robotic arm to adapt to different cavity structures and wafer paths.

System startup initialization calibration
Perform robotic arm zeroing and positioning calibration actions during device startup to ensure handling accuracy and repeatability.

Product advantages
High precision motion control: meets the stringent requirements for stability and positioning accuracy in semiconductor wafer handling

Modular structure: easy to maintain and replace faults quickly, supporting standardized maintenance strategies

Highly compatible with the original equipment: designed specifically for the Gasonics Aura system, with signal interfaces and logical logic highly matched

Industrial grade reliability: capable of long-term stable operation in complex environments such as vacuum, high temperature, and high-frequency operation