Gasonics 27-286643-00 Controller Board Module

Brand:Gasonics
Model: 27-286643-00
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 27-286643-00 Controller Board Module

Product manual:

product name
Gasonics 27-286643-00 Controller Board Module

Product application areas
Core control module of plasma ashing equipment
Applied to plasma debonding and ashing processing systems of Gasonics Aura 2000LL and other models, serving as the main control logic core of the equipment.

Process logic control
Manage the signal processing, sequential execution, parameter setting, and process interlocking of the entire process flow to ensure that the equipment operates automatically according to the set logic.

Subsystem coordination and scheduling
Control and coordinate the collaborative work of multiple subsystems such as RF power supply, vacuum pump, gas path system, wafer handling platform, etc.

Signal processing and command execution
Receive control commands from the operating interface or upper computer, perform process parameter configuration and functions such as process start, pause, alarm, etc.

Firmware Logical Storage and Execution
EPROM firmware can be configured on the board to store control program logic, achieve version management, and customize functions.

Equipment maintenance and module replacement
Commonly used as a replacement module for equipment control failures to restore system functionality, it is a key spare part in equipment maintenance and upkeep.