Gasonics 38378-4 Control Board

Brand:Gasonics
Model: 38378-4
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 38378-4 Control Board

Product manual:

product name
Gasonics 38378-4 Control Board

Product application areas
Core control unit of plasma equipment
Used in Gasonics plasma ashing or etching systems as a control logic execution board for subsystems or the entire machine, managing process instructions and signal processing.

Process parameter management and execution
Responsible for controlling key process parameters such as heating, gas flow rate, and RF power to ensure stable operation of equipment within the set process window.

Signal processing and interface coordination
Integrated input/output interface circuit, receives signals from sensors, switches, and actuators, and communicates with the upper system or main control board.

Module level equipment coordination control
Manage the operational status of specific equipment modules (such as vacuum chambers, RF systems, cooling units) to achieve collaboration and linkage among multiple modules.

System maintenance and rapid replacement
During equipment maintenance or upgrade, it can be used as a replacement board to restore control functions, shorten maintenance time, and reduce equipment downtime risks.

Support fault alarm and status feedback
Provide detection and feedback functions for various abnormal states in the process, enhancing the system's self diagnosis and protection capabilities.