Gasonics 73-0068 Elevator Alignment Tool

Brand:Gasonics
Model:73-0068
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 73-0068 Elevator Alignment Tool

Product manual:

Brief introduction
Name: Elevator Alignment Tool

Part number: 73-0068

Applicable models: Gasonics plasma processing equipment (such as A-2000, Aura, PEP series)

Purpose: Used for mechanical alignment and position correction of elevator platforms in load lock chambers or process chambers

Equipment Type: Specialized Calibration/Maintenance Assistance Tool

2、 Functional purpose
This tool is used to ensure that the elevator lifting platform is in a precise vertical travel and horizontal positioning state before or after equipment operation or maintenance, ensuring that the alignment accuracy between the wafer and the transfer robotic arm meets the standard, and avoiding:

Wafer transfer failure

Platform and robotic arm interference

Wafer placement offset or fragmentation

The cavity door cannot be closed correctly

3、 Typical usage scenarios
Scenario description
🛠️ Initial setting of elevator start and stop positions for new equipment installation
🔄 After replacing the elevator motor, verify the accuracy of the upper limit, middle position, and lower limit of the travel
⚙️ Software parameter adjustment combined with motion offset adjustment
🧪 Test the alignment height of the wafer and verify that there is no deviation in the wafer pick/face
🧰 Regular maintenance to avoid position drift caused by vibration and long-term use

4、 Overview of usage methods
Install alignment tool: Fix the 73-0068 tool on the elevator platform or specific calibration fixture position

Manual/software controlled lifting: Move the platform to the designated "alignment reference point"

Use a feeler gauge or visual inspection platform to check the gap between the platform and the reference edge

Adjust the initial position of the mechanical limit screw or motor (if any)

Repeatedly testing the wafer grasping and releasing accuracy of the transmission robotic arm