Gasonics 73797-04 Control Module

Brand:Gasonics
Model:73797-04
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 73797-04 Control Module

Product manual:

Product Function and Function:
As a key control unit in Gasonics plasma processing equipment, it is mainly used for logic operations, signal processing, and subsystem coordination.

Control core functions such as power, gas flow, fire control logic, power status, interlock system, etc.

Provide feedback on equipment operation status to achieve precision process control.

Application areas:
Semiconductor wafer debonding and cleaning equipment (such as Aura and PEP series)

Process equipment for plasma stripping, etching, surface cleaning, etc

Thin film processing system in display panel manufacturing

Automation Control Platform in Microelectronics Device Packaging Line

Key control boards in high cleanliness laboratories or customized plasma systems

characteristic:
Industrial grade circuit board design with anti-interference and long-life performance

Used in conjunction with the main control system of Gasonics series equipment

Support stable signal transmission and fault interlock protection function