Gasonics 73797-05 Control Motherboard

Brand:Gasonics
Model:73797-05
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 73797-05 Control Motherboard

Product manual:

Gasonics   73797-05 Controller Mainboard

Function and Function
This module is a critical logic control circuit board, commonly referred to as an SCR control board or PWA screen control board, used for core control tasks in Gasonics plasma processing equipment.

The main instruction calculation and distribution of the execution control system include functions such as power regulation, gas switching, safety interlocking, and fault protection.

Receive commands from the human-machine interface or main control board and issue control signals to various subsystems.

application area
The core control module in Gasonics Aura series, PEP series, and A-2000LL plasma stripping equipment.

Control RF power system, heating/lamp control, power management, gas flow switching, and sensor feedback processing.

Applied to key process equipment such as semiconductor wafer cleaning, photoresist removal, and pre-treatment before packaging.

Used for stable control and interlocking coordination in high cleanliness automated production systems.

Characteristics and advantages
Industrial grade PCB design, strong resistance to electromagnetic interference, and long-term operational stability.

High structural compatibility with other boards in the Gasonics series equipment, such as A90-005 control board, gas interface board, power board, etc.

Modular design facilitates replacement, maintenance, and system upgrades.