Gasonics 810-1213 Cam Sensor

Brand:Gasonics
Model: 810-1213
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 810-1213 Cam Sensor

Product manual:

product name
Gasonics 810-1213 Cam Sensor

Product application areas
Mechanical motion detection of semiconductor plasma processing equipment
Used to detect the position and rotation status of mechanical cams inside equipment, ensuring accurate positioning and timing control of moving parts such as robotic arms and valves.

Process step synchronization and interlocking control
Synchronize mechanical actions through sensor feedback, and cooperate with equipment control systems to achieve safety interlocking and process control.

Mechanical system status monitoring and fault diagnosis
Monitor the operation status of the cam to prevent mechanical jamming or abnormalities, and assist equipment maintenance personnel in troubleshooting and preventive maintenance.

Motion position feedback input
Provide precise mechanical position signals for the controller and support precise adjustment of moving parts in closed-loop control systems.

Equipment upgrade and maintenance replacement
As a standard component of the original factory, it is used to replace damaged or degraded cam sensors in Gasonics equipment such as Aura.

Laboratory and R&D equipment mechanical motion monitoring
During the equipment development and testing phase, it is used to verify the accuracy and synchronization of mechanical motion.