Details
Gasonics 853-1600-001 Robot Arm Component
Product manual:
product overview
Gasonics 853-1600-001 is a robotic arm component used in Gasonics plasma processing equipment,
Usually used as part of a complete robot kit, such as A94-062-01. This component is produced by Hine Design,
The model is 853-2493-001, which includes a robotic arm, Theta circuit board, end effector, and connecting cable.
This kit is a brand new inventory item suitable for equipment maintenance and upgrades.
Technical specifications (typical)
Robot arm model: Theta Arm (model 853-2493-001)
Circuit board model: Theta Board, model 778-21
End effector: Theta End effector
Connecting cables: Theta Cables
Installation method: Modular design, easy to integrate into the device
Compatibility: Highly compatible with Gasonics plasma processing equipment
application area
Plasma cleaning and stripping equipment
In Gasonics plasma processing equipment, the 853-1600-001 robotic arm component is used for automatic wafer handling and processing, ensuring process automation and efficiency.
Laboratory and R&D environment
Provide necessary robot support for plasma processing equipment in laboratories and research and development environments to meet different experimental needs.
Product advantages
High stability: Provides stable movement of the robotic arm to ensure the normal operation of the equipment.
Strong compatibility: Highly compatible with Gasonics plasma processing equipment, easy to install and replace.
Compact structure: Compact design, small footprint, suitable for various device configurations.
High reliability: using high-quality components, with a long service life and low failure rate.
Product details picture:

853-1600-001
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