Gasonics 853-4290-001 Load Lock Elevator Module

Brand:Gasonics
Model:853-4290-001
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

Gasonics 853-4290-001 Load Lock Elevator Module

Product manual:

1、 Product Overview
Gasonics 853-4290-001 is a Loadlock Elevator Module installed in Gasonics plasma processing equipment,
The main function is to control the lifting action of the sample tray in the cavity, and achieve the loading and unloading of wafers.

2、 Technical role
Realize the vertical lifting action of the wafer in the vacuum load lock chamber;

Control the entry or exit of wafers from the transfer system into or out of the main process chamber;

Cooperate with pneumatic or motor drive systems to achieve precise position control;

Provide communication feedback (such as in place signals) between the device controller (PLC/HMI);

3、 Application Fields
1. Semiconductor wafer manufacturing
Load lock structure used in Gasonics plasma stripping equipment (such as PEP, Aura series) to achieve wafer transfer;

The key process stages include: photoresist stripping after photolithography, dry cleaning, thin film processing, etc;

Commonly used in automatic wafer loading and unloading systems for 150mm, 200mm, and even 300mm wafers.

2. Production of compound semiconductors/power devices
Elevator modules are used to ensure wafer transfer in high cleanliness environments during the production of compound semiconductors such as GaN and SiC;

Reduce particle pollution and adapt to precision processing of various materials.

3. Pre packaging and testing process equipment
In situations where surface modification or plasma activation treatment is required, the load lock elevator module supports high-throughput loading and unloading operations;

Improve equipment automation level and reduce manual intervention.