Gasonics 853-4290-002 Load Lock Elevator Module
Brand:Gasonics
Model: 853-4290-002
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
Gasonics 853-4290-002 Load Lock Elevator Module
Product manual:
product name
Gasonics 853-4290-002 Load Lock Elevator Module
Product application areas
Load lock chamber wafer lifting control
Used in Gasonics plasma equipment to control the lifting action of wafers in the load lock chamber, achieving a smooth transition of wafers from the carrier to the process chamber.
Core components of automatic loading and unloading system
As a key execution module in automated handling systems, it collaborates with vacuum robotic arms to achieve precise positioning and transfer of wafers.
Pre - and post process transmission buffering
Provide temporary storage and adjustment of wafers before and after the process in a vacuum environment, effectively isolating the process chamber from the external environment and ensuring the stability of the vacuum process.
Position control and sensor feedback
Equipped with position sensors for precise control of elevator travel, providing real-time position feedback, achieving closed-loop control, and improving equipment operation safety and accuracy.
Equipment maintenance and replacement module
Commonly used for load lock system maintenance of Aura or A3000 series equipment, as a factory replacement component, used to repair lifting faults or improve transmission performance.
Precise motion control in clean environment
Designed to meet the requirements for clean room use and suitable for precision mechanical motion in semiconductor manufacturing environments with strict particle control.
Product details picture:
853-4290-002
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