Gasonics 855-2423 Pneumatic Controller Module

Brand:Gasonics
Model: 855-2423
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 855-2423 Pneumatic Controller Module

Product manual:

product name
Gasonics 855-2423 Pneumatic Controller Module

Product application areas
Semiconductor equipment wafer handling system
The module is mainly used for wafer handling robotic arms in Gasonics plasma ashing or etching equipment,
Control its pneumatic execution actions, such as grasping, releasing, extending, and rotating.

Pneumatic valve control system
Pneumatic valve management applied in plasma equipment vacuum chambers,
Control the opening and closing actions of key valve bodies in processes such as intake, exhaust, and vacuum extraction.

Automatic loading and unloading system
Pneumatic cylinder drive for controlling automated loading and unloading mechanisms,
Realize safe and efficient movement of wafers between processing chambers and wafer systems.

Gasonics Aura series equipment maintenance and replacement
It is one of the control modules specifically used in the Aura 2000, Aura 3010 and other series,
Widely used in equipment maintenance, replacement, and old machine refurbishment projects.

Experimental equipment and modification system control module
Some research institutions or technical experimental platforms use this module for pneumatic control experiments,
Or integrate it into independently designed wafer processing and testing equipment.