Gasonics 90-1002-02 Valve Control Module

Product manual:

product name
Gasonics 90-1002-02 Valve Control Module
Valve Control Module

1、 Product Overview
The Gasonics 90-1002-02 valve control module is Gasonics (now known as Novellus Systems, partially integrated into Lam Research)
The key components used to control the opening and closing of gas or vacuum system valves in plasma ashing and cleaning equipment.
This module achieves precise on/off control of multiple pneumatic valves by receiving control signals from the main control system,
Ensure accurate adjustment of gas flow rate and process atmosphere during the plasma process.

2、 Technical parameters
Equipment type: Gas/Vacuum Valve Control Module

Control channel: Multi channel solenoid valve control (the specific number of channels depends on the configuration)

Input signal:

TTL or 24VDC control signal (from main control board or PLC)

Output format:

Control the opening or closing status of the solenoid valve (ON/OFF)

Power supply requirements:

Usually+24 VDC (module power supply and valve drive)

Status indication:

Onboard LED indicates the status of each channel valve

Interface method:

Slot type connection or backplane connection

Communicate with the main controller or I/O card through an internal bus

Compatible models:

Compatible with multiple plasma equipment models such as Gasonics Aura, L3510, L2100, AE2001, etc

Product details picture:

90-1002-02

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