Gasonics 90-1028-01 Programmable Pressure Module

Brand:Gasonics
Model:90-1028-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 90-1028-01 Programmable Pressure Module

Product manual:

1、 Product Overview
Gasonics 90-1028-01 is a programmable pressure module designed specifically for plasma processing equipment, used for real-time monitoring and control of pressure parameters inside the equipment chamber.
This module integrates high-precision pressure sensors and programmable control units, which can automatically adjust the chamber pressure according to preset parameters, ensuring the stability and repeatability of the process environment.
Suitable for various gas environments, supporting digital interface and communication with the main control system.

2、 Application Fields
1. Plasma stripping and etching equipment
Real time adjustment and monitoring of reaction chamber pressure to ensure process accuracy;

Support multi-stage pressure curve control to meet complex process requirements.

2. Load lock and vacuum system
Control the vacuum degree of the chamber and coordinate the operation of the vacuum pump and gas valve;

Prevent equipment failure or process failure caused by abnormal pressure.

3. Semiconductor manufacturing automation equipment
Integrated with the main control system, supporting remote parameter setting and status monitoring;

Ensure the safety and stability of the process environment.

3、 Product advantages
✅ High precision pressure sensing: using high-quality sensing components for high measurement accuracy;

✅ Flexible programming function: supports multiple pressure setting schemes to meet different process requirements;

Digital interface communication: convenient integration into existing control systems to achieve automated management;

✅ Compact structure, easy to install: suitable for environments with limited internal space of equipment;

✅ Reliable and durable: Industrial grade design, suitable for clean rooms and high vacuum environments.