Gasonics 90-1031-01 Interface Board

Product manual:

The Gasonics 90-1031-01 Interface Board is a key signal relay module in Gasonics plasma stripping equipment,
Used to connect electrical signals between the main control system and various execution/detection submodules,
Implement functions such as data communication, control signal distribution, and status feedback within the device.

1、 Product Overview
The Gasonics 90-1031-01 interface board is a signal interface module designed specifically for the Gasonics series plasma equipment,
Installed on the main control unit or backplane inside the rack, it is used to centrally manage and relay control signals, power signals, or sensor feedback signals.
Its function is similar to a "signal router" and it is an important component for interconnecting subsystems within the device.

2、 Main functions
Functional classification description
Signal relay and distribution receive control signals from the main control board or PLC, and distribute them to subsystems such as RF power supply, vacuum pump, heater, gas control, etc
Signal integration consolidates the feedback signals from various sensors (such as temperature, pressure, airflow, etc.) and transmits them to the main controller
Internal integration of optocouplers, resistors, capacitors, and other isolation circuits for electrical isolation enhances the system's anti-interference capability
Interface extension provides multi-channel input/output interfaces, facilitating system function expansion or subsequent upgrades

3、 Application scenarios
The Gasonics 90-1031-01 interface board is widely used in the following application environments:

Main control system of Gasonics plasma stripping machine

Connect the main controller to the RF power supply MFC、 Chamber heater, alarm light, etc

Signal Summary and System Debugging

Provide I/O debugging signal ports for device engineering mode, facilitating quick troubleshooting

Modular system construction

As a modular interface platform, it supports on-demand configuration of functional modules for devices

Product details picture:

90-1031-01

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