Gasonics 90-2516 Mini Controller Module

Brand:Gasonics
Model: 90-2516
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 90-2516 Mini Controller Module

Product manual:

product name
Gasonics 90-2516 Mini Controller Module

1、 Product Overview
Gasonics 90-2516 is a small controller module for plasma cleaning equipment, which has the function of collecting and adjusting signals from mass flow controllers (MFC) or mass flow meters (MFM), and also has a microwave signal control interface. This module is used to achieve the linkage control of gas flow control and plasma excitation, and is one of the key components in the Gasonics Aura series system.

2、 Technical parameters
Module type: Mini Controller module

Function support: MFC/MFM interface signal processing+microwave signal control

Interface type: Analog signal input/output+digital control signal transmission

Installation method: PCB plug-in card, inserted into the backplane or main control system

Indicator system: onboard status indicator light (depending on specific version)

Work environment: Suitable for industrial grade high interference plasma equipment environment

3、 Application scenarios
Gas flow control for Gasonics plasma equipment

Linkage microwave signal control, used to excite or regulate plasma intensity

As a signal conversion bridge, it converts analog input signals into digital control

Replace damaged modules and maintain precise control function of equipment

4、 Product advantages
Multi functional integration, compact structure, easy to maintain

High reliability, suitable for long-term continuous operation environment