Gasonics 90-2588 Controller Module

Brand:Gasonics
Model: 90-2588
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 90-2588 Controller Module

Product manual:

product name
Gasonics 90-2588 Controller Module

Product application areas
Core control unit of plasma equipment
As the main control module in Gasonics plasma ashing or etching systems, responsible for managing and executing the overall process flow.

Process parameter adjustment and monitoring
Control key process parameters such as gas flow rate, RF power, temperature, and mechanical action to ensure process stability and yield.

Signal processing and equipment coordination
Integrate input/output interfaces, coordinate communication between subsystems, and achieve synchronized operation of multiple modules.

Automated process control support
Support automatic operation of equipment, sequential execution of process steps, and handling of abnormal states to improve production efficiency and safety.

Equipment maintenance and module replacement
Used for equipment malfunction repair or system upgrade, replacing the original control module to ensure the continuous and stable operation of the equipment.

System diagnosis and fault alarm
Provide fault detection, alarm output, and status feedback functions to assist maintenance personnel in quickly locating and solving problems.