Gasonics 90-2608 Load Lock Interface Board

Brand:Gasonics
Model: 90-2608
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 90-2608 Load Lock Interface Board

Product manual:

Product Name: Gasonics 90-2608 Loading Lock Interface Board
Component type: Loadlock Control Interface PCB
Main function: Used in Gasonics plasma equipment to achieve signal interface and logic control between the Loadlock area and the main control system, ensuring the automation and safety of the process chamber feeding and discharging process.

1、 Overview of loading lock area function
Loadlock is a transitional area used in semiconductor devices for transferring wafers between atmospheric environments and vacuum process chambers. The 90-2608 interface board is one of the key control components in this area.

Typical tasks:

Control the start/stop of the vacuum pump

Monitor the vacuum pressure status signal

Drive door control cylinder/solenoid valve action

Communicate with the main system and report status (such as "Ready", "Busy", "Error")

2、 Signal interface and communication
This interface board connects the main control system with the load lock execution components (such as sensors, valves, pumps) and is responsible for signal conversion and logic relay.

Interface support content:

Digital input/output (such as door switch status, vacuum confirmation)

Analog input (such as vacuum sensor feedback)

Control output (driving vacuum valve, air valve, door lock)

Possible integration of RS-232/TTL communication interface (for status synchronization)

3、 Process control support
The 90-2608 board works in conjunction with the main control system program flow to achieve safe loading and unloading operations before and after the fully automated process flow.

Cooperate with the control process:

Check that the outer door is closed

Start vacuuming to the set pressure

Inner door open → wafer transfer → inner door closed

Recharge to atmospheric pressure

Open the outer door to retrieve the film