Gasonics 90-2627 Temperature Monitor

Brand:Gasonics
Model: 90-2627
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 90-2627 Temperature Monitor

Product manual:

product name
Gasonics 90-2627 Temperature Monitor

Product application areas
Temperature monitoring of semiconductor plasma processing equipment
Used to monitor the temperature of key components in plasma ashing and etching equipment,
Ensure that the process temperature is maintained within the set range, including heating tables, chambers, and related sensors.

Process safety protection system
Through real-time temperature monitoring, prevent equipment damage caused by overheating or abnormal temperature,
Trigger alarm or interlock protection to ensure the safety of equipment and operators.

Temperature data collection and feedback
Convert the temperature signal into an electrical signal and transmit it to the main control system or display unit,
Used for adjusting process parameters and monitoring equipment operation.

Components of automated temperature control system
Integrated into automatic control systems such as gas flow rate and RF power,
Implement closed-loop temperature control to improve process stability and yield.

Equipment maintenance and fault diagnosis
As one of the maintenance tools, it helps technicians quickly detect the cause of temperature anomalies,
Auxiliary equipment fault location and repair.

Temperature monitoring of laboratory and R&D equipment
Applied to semiconductor equipment in the laboratory or research and development stage, providing precise temperature data to support process optimization.