Gasonics 90-2736 Controller Module

Brand:Gasonics
Model: 90-2736
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 90-2736 Controller Module

Product manual:

1、 Product Overview
The Gasonics 90-2736 controller module is the core control component applied in the Gasonics series plasma ashing equipment, mainly used to coordinate the operation status of various subsystems inside the equipment, including gas flow rate, temperature control, RF matching, power distribution, etc. As a component of the equipment control system, this module works in conjunction with other I/O cards, valve control cards, temperature control modules, etc. to achieve fully automatic process control logic.

2、 Technical parameters
Module Type: Main Controller/System Control Logic Module

Equipment platform: Gasonics Aura, L2100, L3510, AE2001 and other series plasma equipment

Interface type:

Backplane Bus connection

Standard signal lines are connected to I/O control boards, valve control modules, temperature control cards, etc

Input signal:

From the operating interface, sensors (temperature, pressure, RF power)

Output control:

Send control signals to sub modules such as valve control, power supply, temperature control, electromagnetic relay, etc

Functional features:

Process sequence control

Security interlock logic management