Details
Gasonics 908-061N-R Controller
Product manual:
Gasonics 908-061N-R Controller - Product Application Fields
This controller is mainly used for the management of ultraviolet lamps in Gasonics plasma cleaning equipment and is a key process auxiliary module. Its product application areas include:
Semiconductor manufacturing process
Used for lighting and regulating ultraviolet lamps in plasma stripping and cleaning processes on wafer surfaces,
Ensure stable plasma source, improve stripping efficiency and consistency.
Display panel manufacturing
In the production of AMOLED, LCD and other displays, controlling the start and stop of ultraviolet lamps,
Ensure uniform peeling of the film layer and surface treatment quality.
Microelectronics Device Processing
By precisely controlling the ultraviolet light source, high-precision photoresist removal and surface cleaning can be achieved with the assistance of microfabrication equipment.
Research and customized plasma equipment
Used in laboratories or special application equipment, responsible for controlling the working status of ultraviolet lamps and adjusting process parameters.
This controller ensures the safe and reliable lighting of the lamp tube, reduces the failure rate, and improves the stability of equipment operation and process yield.
If the lamp control is abnormal, it may cause uneven process or equipment shutdown, so the controller plays an important role in ensuring the operation of the equipment.
Product details picture:

908-061N-R
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