Gasonics 94-1104 Microwave Power Generator

Brand:Gasonics
Model: 94-1104
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 94-1104 Microwave Power Generator

Product manual:

Product Overview:
Gasonics 94-1104 is a microwave power generator commonly used in semiconductor process equipment,
Especially in plasma excitation systems, stable microwave power is provided to excite gases and form plasma.
This component is produced by Astex (later under Gerling/Gasonics) and is an industrial grade high-frequency microwave energy source,
Widely used in PECVD, plasma etching, and ashing systems.

Technical parameters (typical):

Output power: approximately 1250 watts (microwave output)

Output voltage: approximately 4300 VDC

Input power supply: AC 190-240V, single-phase power supply

Operating frequency: 2.45 GHz (standard microwave frequency)

Control mode: external control signal or local adjustment

Packaging form: Industrial rack mounted module

Cooling method: air-cooled or water-cooled (depending on the version)

Application scenarios:

Plasma excitation system
Provide microwave energy for activating the reaction gas to form high-density plasma.

PECVD process equipment
Support plasma chemical vapor deposition (such as thin film deposition, dielectric layer deposition, etc.).

Semiconductor etching and ashing machine
Used to drive microwave sources in plasma etching or photoresist removal systems.