Gasonics 94-2806 Robot Arm Module

Brand:Gasonics
Model: 94-2806
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 94-2806 Robot Arm Module

Product manual:

1、 Product Overview
Gasonics 94-2806 is a robotic arm module used in Gasonics plasma processing equipment,
Mainly used for automatic handling and alignment of wafers or workpieces inside equipment.
This module integrates mechanical structures, drive components (such as servo motors), sensor systems, and interfaces with the main control system,
Capable of high-precision wafer loading and unloading, rotation, and transfer in vacuum or clean room environments,
It is one of the key components for achieving fully automated operation.

2、 Application Fields
1. Plasma stripping/cleaning equipment
Used for automatic handling of wafers between the main processing chamber and the load lock;

Reduce human intervention, improve system productivity and cleanliness.

2. Front wafer processing equipment
Transport wafers before and after photolithography, etching, deposition, and other processes to ensure seamless integration;

Can be paired with Gasonics Aura, PEP series and other equipment.

3. Automation of semiconductor packaging testing
Capture and accurately place bare or packaged chips from the carrier onto the testing platform;

Improve operational accuracy, reduce errors and loss rates.

4. Research and process development platform
Suitable for situations where high cleanliness is required in R&D systems such as universities and research institutions;

Realize automatic transfer of samples under different experimental conditions.