Gasonics 94-3441 Load Lock Outer Door

Brand:Gasonics
Model: 94-3441
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Gasonics 94-3441 Load Lock Outer Door

Product manual:

Product Features:
Used as an external isolation door for the Load Lock Chamber in Gasonics plasma equipment

Implement physical isolation of wafers from the external environment before entering or exiting the equipment

Collaborate with the vacuum system, elevators, and robots inside the equipment to ensure safe and efficient transfer of wafers between vacuum and atmosphere

Provide air tightness protection to prevent particles, moisture, oxygen and other pollutants from entering the load lock area

Application areas:
Semiconductor manufacturing equipment: wafer loading and unloading system

Plasma stripping equipment: used for wafer enclosed transfer in series such as AURA, A-2000, PEP, etc

Vacuum process platform: including front-end processing equipment, pre cleaning, etching, and packaging cleaning systems

Cleanroom automation system: a closed door system that requires rapid switching between the chamber and the external environment

characteristic:
Industrial grade aluminum alloy or stainless steel structure, corrosion-resistant and high strength

Equipped with high reliability sealing rings to ensure stable operation in high vacuum environments

Support automatic opening and closing mechanism linked with robotic arm and load lock elevator

Compact structure, easy installation and maintenance, compatible with various Gasonics series equipment